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JOHNSON KS
THYWISSEN JH
DEKKER NH
BERGGREN KK
CHU AP
YOUNKIN R
PRENTISS M
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Authors:
THYWISSEN JH
JOHNSON KS
YOUNKIN R
DEKKER NH
BERGGREN KK
CHU AP
PRENTISS M
LEE SA
Citation: Jh. Thywissen et al., NANOFABRICATION USING NEUTRAL ATOMIC-BEAMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2093-2100
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Authors:
JOHNSON KS
BERGGREN KK
BLACK A
BLACK CT
CHU AP
DEKKER NH
RALPH DC
THYWISSEN JH
YOUNKIN R
TINKHAM M
PRENTISS M
WHITESIDES GM
Citation: Ks. Johnson et al., USING NEUTRAL METASTABLE ARGON ATOMS AND CONTAMINATION LITHOGRAPHY TOFORM NANOSTRUCTURES IN SILICON, SILICON DIOXIDE, AND GOLD, Applied physics letters, 69(18), 1996, pp. 2773-2775