Authors:
FLICSTEIN J
PATA S
LESOLLIEC JM
CHUN LSHK
PALMIER JF
COURANT JL
Citation: J. Flicstein et al., A MONTE-CARLO SIMULATION OF SILICON-NITRIDE THIN-FILM MICROSTRUCTURE IN ULTRAVIOLET LOCALIZED-CHEMICAL VAPOR-DEPOSITION, Computational materials science, 10(1-4), 1998, pp. 116-126
Authors:
CHUN LSHK
COURANT JL
FALCOU A
OSSART P
POST G
Citation: Lshk. Chun et al., UV-DEPOSITED SILICON-NITRIDE COUPLED WITH XEF2 SURFACE CLEANING FOR III-V OPTOELECTRONIC DEVICE PASSIVATION, Microelectronic engineering, 36(1-4), 1997, pp. 69-72