Authors: DONNELLY VM MALYSHEV MV KORNBLIT A CIAMPA NA COLONELL JI LEE JTC

Citation: Vm. Donnelly et al., TRACE RARE-GASES OPTICAL-EMISSION SPECTROSCOPY FOR DETERMINATION OF ELECTRON TEMPERATURES AND SPECIES CONCENTRATIONS IN CHLORINE-CONTAININGPLASMAS, JPN J A P 1, 37(4B), 1998, pp. 2388-2393

Authors: MALYSHEV MV DONNELLY VM KORNBLIT A CIAMPA NA

Citation: Mv. Malyshev et al., PERCENT DISSOCIATION OF CL-2 IN INDUCTIVELY-COUPLED, CHLORINE-CONTAINING PLASMAS, Journal of applied physics, 84(1), 1998, pp. 137-146