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Citation: F. Clenet et al., EXPERIMENTAL-STUDY OF AN RF MAGNETRON DISCHARGE FOR THIN-FILM DEPOSITION, Surface & coatings technology, 97(1-3), 1997, pp. 528-532

Authors: PEIGNON MC CLENET F TURBAN G

Citation: Mc. Peignon et al., CONTACT ETCHING PROCESS CHARACTERIZATION BY USING ANGULAR X-RAY PHOTOELECTRON-SPECTROSCOPY TECHNIQUE, Journal of the Electrochemical Society, 143(4), 1996, pp. 1347-1354