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Citation: Jt. Butler et al., MULTICHIP-MODULE PACKAGING OF MICROELECTROMECHANICAL SYSTEMS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 15-22

Authors: COMTOIS JH MICHALICEK MA BARRON CC

Citation: Jh. Comtois et al., ELECTROTHERMAL ACTUATORS FABRICATED IN 4-LEVEL PLANARIZED SURFACE MICROMACHINED POLYCRYSTALLINE SILICON, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 23-31

Authors: COMTOIS JH BRIGHT VM

Citation: Jh. Comtois et Vm. Bright, APPLICATIONS FOR SURFACE-MICROMACHINED POLYSILICON THERMAL ACTUATORS AND ARRAYS, Sensors and actuators. A, Physical, 58(1), 1997, pp. 19-25

Authors: BRIGHT VM COMTOIS JH REID JR SENE DE

Citation: Vm. Bright et al., SURFACE MICROMACHINED MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS, IEICE transactions on electronics, E80C(2), 1997, pp. 206-213

Authors: ROGGEMAN MC BRIGHT VM WELSH BM HICK SR ROBERTS PC COWAN WD COMTOIS JH

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Authors: SENE DE BRIGHT VM COMTOIS JH GRANTHAM JW

Citation: De. Sene et al., POLYSILICON MICROMECHANICAL GRATINGS FOR OPTICAL MODULATION, Sensors and actuators. A, Physical, 57(2), 1996, pp. 145-151