Authors:
PIESTRUP MA
POWELL MW
MROWKA S
CREMER JT
LOMBARDO LW
CHASE MB
SNYDER D
RIETDYK H
MARUYAMA XK
Citation: Ma. Piestrup et al., A TRANSITION RADIATION SOURCE WITH A GRAZING ANGLE OPTIC FOR STEP ANDSCAN LITHOGRAPHY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 145(1-2), 1998, pp. 230-235
Authors:
PIESTRUP MA
LOMBARDO LW
CREMER JT
RETZLAFF GA
SILZER RM
SKOPIK DM
KAPLIN VV
Citation: Ma. Piestrup et al., INCREASED X-RAY-PRODUCTION EFFICIENCY FROM TRANSITION RADIATORS UTILIZING A MULTIPLE-PASS ELECTRON-BEAM, Review of scientific instruments, 69(6), 1998, pp. 2223-2229