Authors:
MCCULLOUGH RW
GEDDES J
CROUCHER JA
WOOLSEY JM
HIGGINS DP
SCHLAPP M
GILBODY HB
Citation: Rw. Mccullough et al., ATOMIC NITROGEN-PRODUCTION IN A HIGH-EFFICIENCY MICROWAVE PLASMA SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(1), 1996, pp. 152-155