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Results: 1-5 |
Results: 5

Authors: BOOTH JP CUNGE G NEUILLY F SADEGHI N
Citation: Jp. Booth et al., ABSOLUTE RADICAL DENSITIES IN ETCHING PLASMAS DETERMINED BY BROAD-BAND UV ABSORPTION-SPECTROSCOPY, Plasma sources science & technology, 7(3), 1998, pp. 423-430

Authors: CUNGE G CHABERT P BOOTH JP
Citation: G. Cunge et al., LASER-INDUCED FLUORESCENCE DETECTION OF SIF2 AS A PRIMARY PRODUCT OF SI AND SIO2 REACTIVE ION ETCHING WITH CF4 GAS, Plasma sources science & technology, 6(3), 1997, pp. 349-360

Authors: BOOTH JP CUNGE G SADEGHI N BOSWELL RW
Citation: Jp. Booth et al., THE TRANSITION FROM SYMMETRICAL TO ASYMMETRIC DISCHARGES IN PULSED 13.56-MHZ CAPACITIVELY COUPLED PLASMAS, Journal of applied physics, 82(2), 1997, pp. 552-560

Authors: BRAITHWAITE NS BOOTH JP CUNGE G
Citation: Ns. Braithwaite et al., A NOVEL ELECTROSTATIC-PROBE METHOD FOR ION FLUX MEASUREMENTS, Plasma sources science & technology, 5(4), 1996, pp. 677-684

Authors: CUNGE G BOOTH JP DEROUARD J
Citation: G. Cunge et al., ABSOLUTE CONCENTRATION MEASUREMENTS BY PULSED LASER-INDUCED FLUORESCENCE IN LOW-PRESSURE GASES - ALLOWING FOR SATURATION EFFECTS, Chemical physics letters, 263(5), 1996, pp. 645-650
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