Authors: STERN MB GEIS MW CURTIN JE

Citation: Mb. Stern et al., NANOCHANNEL FABRICATION FOR CHEMICAL SENSORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2887-2891

Authors: STERN MB PALMATEER SC HORN MW ROTHSCHILD M MAXWELL BE CURTIN JE

Citation: Mb. Stern et al., PROFILE CONTROL IN DRY DEVELOPMENT OF HIGH-ASPECT-RATIO RESIST STRUCTURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3017-3021