Citation: I. Czech et al., ON THE REDUCTION OF CARRIER SPILLING EFFECTS DURING RESISTANCE MEASUREMENTS WITH THE SPREADING IMPEDANCE PROBE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 298-303
Authors:
SNAUWAERT J
HELLEMANS L
CZECH I
CLARYSSE T
VANDERVORST W
PAWLIK M
Citation: J. Snauwaert et al., TOWARDS A PHYSICAL UNDERSTANDING OF SPREADING RESISTANCE PROBE TECHNIQUE PROFILING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 304-311