Authors:
Chun, JS
Carlsson, JRA
Desjardins, P
Bergstrom, DB
Petrov, I
Greene, JE
Lavoie, C
Cabral, C
Hultman, L
Citation: Js. Chun et al., Synchrotron x-ray diffraction and transmission electron microscopy studiesof interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers, J VAC SCI A, 19(1), 2001, pp. 182-191
Authors:
Ramanath, G
Greene, JE
Carlsson, JRA
Allen, LH
Hornback, VC
Allman, DJ
Citation: G. Ramanath et al., W deposition and titanium fluoride formation during WF6 reduction by Ti: Reaction path and mechanisms, J APPL PHYS, 85(3), 1999, pp. 1961-1969