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Results: 5

Authors: Nylen, U Cekan, E Jonasson, GB Lewin, F Skog, S
Citation: U. Nylen et al., Effects of 5-fluorouracil on cell cycle arrest and toxicity induced by X-irradiation in normal mammalian cells, CELL PROLIF, 34(2), 2001, pp. 85-98

Authors: Hirscher, S Kaesmaier, R Domke, WD Wolter, A Loschner, H Cekan, E Horner, C Zeininger, M Ochsenhirt, J
Citation: S. Hirscher et al., Resist process development for sub-100-nm ion projection lithography, MICROEL ENG, 57-8, 2001, pp. 517-530

Authors: Volland, B Shi, F Heerlein, H Rangelow, IW Hudek, P Kostic, I Cekan, E Vonach, H Loeschner, H Horner, C Stengl, G Buschbeck, H Zeininger, M Bleeker, A Benschop, J
Citation: B. Volland et al., Fabrication of open stencil masks with asymmetric void ratio for the ion projection lithography space charge experiment, J VAC SCI B, 18(6), 2000, pp. 3202-3206

Authors: de Jager, PWH Mertens, B Munro, E Cekan, E Lammer, G Vonach, H Buschbeck, H Zeininger, M Horner, C Loschner, H Stengl, G Bleeker, AJ
Citation: Pwh. De Jager et al., Comparison of experimental and Monte Carlo results of stochastic Coulomb interaction in projection beam lithography, MICROEL ENG, 53(1-4), 2000, pp. 617-620

Authors: de Jager, PWH Derksen, G Mertens, B Cekan, E Lammer, G Vonach, H Buschbeck, H Zeininger, M Horner, C Loschner, H Stengl, G Bleeker, AJ Benschop, J Shi, F Volland, B Hudek, P Heerlein, H Rangelow, IW Kaesmaier, R
Citation: Pwh. De Jager et al., Experimental results of the stochastic Coulomb interaction in ion projection lithography, J VAC SCI B, 17(6), 1999, pp. 3098-3106
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