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Results: 1
Thermodynamical study of the thermal nitridation for the system NH3/monocristalline Si
Authors:
Sassi, Z Bureau, JC Chafik, K
Citation:
Z. Sassi et al., Thermodynamical study of the thermal nitridation for the system NH3/monocristalline Si, EPJ-APPL PH, 7(3), 1999, pp. 207-216
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