Authors: Nakajima, K Onisawa, K Chahara, K Minemura, T Kamei, M Setoyama, E

Citation: K. Nakajima et al., Stress reduction of chromium thin films deposited by cluster-type sputtering system for ultra-large-size (550 x 650 mm) substrates, VACUUM, 51(4), 1998, pp. 761-764