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Results:
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Results: 2
Profiling of ultrashallow junctions
Authors:
Goeckner, MJ Felch, SB Fang, Z Oberhofer, A Chia, VKF Mount, GR Poulakos, M Keenan, WA
Citation:
Mj. Goeckner et al., Profiling of ultrashallow junctions, J VAC SCI B, 18(1), 2000, pp. 472-476
Recent advances in secondary ion mass spectrometry to characterize ultralow energy ion implants
Authors:
Chia, VKF Mount, GR Edgell, MJ Magee, CW
Citation:
Vkf. Chia et al., Recent advances in secondary ion mass spectrometry to characterize ultralow energy ion implants, J VAC SCI B, 17(5), 1999, pp. 2345-2351
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