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Citation: Fss. Chien et al., Nano-oxidation of silicon nitride films with an atomic force microscope: Chemical mapping, kinetics, and applications, J APPL PHYS, 89(4), 2001, pp. 2465-2472

Authors: Chien, FSS Chang, JW Lin, SW Chou, YC Chen, TT Gwo, S Chao, TS Hsieh, WF

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Authors: Chien, FSS Wu, CL Chou, YC Chen, TT Gwo, S Hsieh, WF

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