Authors: Chiu, HK Lin, TL Hu, Y Leou, KC Lin, HC Tsai, MS Huang, TY

Citation: Hk. Chiu et al., Characterization of titanium nitride etch rate and selectivity to silicon dioxide in a Cl-2 helicon-wave plasma, J VAC SCI A, 19(2), 2001, pp. 455-459

Authors: Busath, J Chiu, HK

Citation: J. Busath et Hk. Chiu, Simple catalytic cell for restoring He leak detector sensitivity on vacuumsystems with high D-2 backgrounds, J VAC SCI A, 17(4), 1999, pp. 2015-2020