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Citation: Hh. Hu et al., The diagnostic micromachined beams on (111) substrate, SENS ACTU-A, 93(3), 2001, pp. 258-265

Authors: Chou, BCS Chen, CN Shie, JS

Citation: Bcs. Chou et al., Micromachining on (111)-oriented silicon, SENS ACTU-A, 75(3), 1999, pp. 271-277