Authors:
Stevie, FA
Downey, SW
Brown, SR
Shofner, TL
Decker, MA
Dingle, T
Christman, L
Citation: Fa. Stevie et al., Nanoscale elemental imaging of semiconductor materials using focused ion beam secondary ion mass spectrometry, J VAC SCI B, 17(6), 1999, pp. 2476-2482