Authors: Pey, KL Chua, HN Siah, SY

Citation: Kl. Pey et al., Effect of BF2+ implantation on void formation in Ti-salicided narrow polysilicon lines, EL SOLID ST, 3(9), 2000, pp. 442-445

Authors: Chua, HN Pey, KL Lai, WH Siah, SY

Citation: Hn. Chua et al., Formation of voids in Ti-salicided BF2+-doped submicron polysilicon lines, J APPL PHYS, 87(12), 2000, pp. 8401-8406