Authors: Dimitrov, R Tilak, V Yeo, W Green, B Kim, H Smart, J Chumbes, E Shealy, JR Schaff, W Eastman, LF Miskys, C Ambacher, O Stutzmann, M

Citation: R. Dimitrov et al., Influence of oxygen and methane plasma on the electrical properties of undoped AlGaN/GaN heterostructures for high power transistors, SOL ST ELEC, 44(8), 2000, pp. 1361-1365