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Langmuir probe studies of a transformer-coupled plasma, aluminum etcher
Authors:
Malyshev, MV Donnelly, VM Kornblit, A Ciampa, NA Colonell, JI Lee, JTC
Citation:
Mv. Malyshev et al., Langmuir probe studies of a transformer-coupled plasma, aluminum etcher, J VAC SCI A, 17(2), 1999, pp. 480-492
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