Citation: C. Cismaru et Jl. Shohet, In situ electrical characterization of dielectric thin films directly exposed to plasma vacuum-ultraviolet radiation, J APPL PHYS, 88(4), 2000, pp. 1742-1746
Authors:
Cismaru, C
Shohet, JL
Lauer, JL
Hansen, RW
Ostapenko, S
Citation: C. Cismaru et al., Depletion of charge produced during plasma exposure in aluminum oxide by vacuum ultraviolet radiation, APPL PHYS L, 77(24), 2000, pp. 3914-3916
Citation: C. Cismaru et al., Synchrotron radiation-induced surface-conductivity of SiO2 for modification of plasma charging, APPL PHYS L, 76(16), 2000, pp. 2191-2193
Citation: C. Cismaru et Jl. Shohet, Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher, APPL PHYS L, 74(18), 1999, pp. 2599-2601