Authors: Kushmerick, JG Hankins, MG de Boer, MP Clews, PJ Carpick, RW Bunker, BC

Citation: Jg. Kushmerick et al., The influence of coating structure on micromachine stiction, TRIBOL LETT, 10(1-2), 2001, pp. 103-108

Authors: Mayer, TM de Boer, MP Shinn, ND Clews, PJ Michalske, TA

Citation: Tm. Mayer et al., Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems, J VAC SCI B, 18(5), 2000, pp. 2433-2440