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Results:
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Results: 2
Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology
Authors:
Coane, P Giasolli, R Ledger, S Lian, K Ling, Z Gottert, J
Citation:
P. Coane et al., Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology, MICROSYST T, 6(3), 2000, pp. 94-98
Graphite-based x-ray masks for deep and ultradeep x-ray lithography
Authors:
Coane, P Giasolli, R De Caro, F Mancini, DC Desta, Y Gottert, J
Citation:
P. Coane et al., Graphite-based x-ray masks for deep and ultradeep x-ray lithography, J VAC SCI B, 16(6), 1998, pp. 3618-3624
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