Authors: Weldon, MK Collot, M Chabal, YJ Venezia, VC Agarwal, A Haynes, TE Eaglesham, DJ Christman, SB Chaban, EE

Citation: Mk. Weldon et al., Mechanism of silicon exfoliation induced by hydrogen/helium co-implantation, APPL PHYS L, 73(25), 1998, pp. 3721-3723