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Results: 1-2 |
Results: 2
Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction
Authors: Armigliato, A Balboni, R Frabboni, S Benedetti, A Cullis, AG Carnevale, GP Colpani, P Pavia, G
Citation: A. Armigliato et al., Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction, MAT SC S PR, 4(1-3), 2001, pp. 97-99
TEM/CBED determination of strain in silicon-based submicrometric electronic devices
Authors: Armigliatoa, A Balboni, R Balboni, S Frabboni, S Tixier, A Carnevale, GP Colpani, P Pavia, G Marmiroli, A
Citation: A. Armigliatoa et al., TEM/CBED determination of strain in silicon-based submicrometric electronic devices, MICRON, 31(3), 2000, pp. 203-209
Risultati: 1-2 |