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PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF A-SIC-H FILMS FROM ORGANOSILICON PRECURSORS
Authors:
LOBODA MJ SEIFFERLY JA DALL FC
Citation:
Mj. Loboda et al., PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF A-SIC-H FILMS FROM ORGANOSILICON PRECURSORS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 90-96
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