Authors:
CLEVENGER LA
ROY RA
CABRAL C
SAENGER KL
BRAUER S
MORALES G
LUDWIG KF
GIFFORD G
BUCCHIGNANO J
JORDANSWEET J
DEHAVEN P
STEPHENSON GB
Citation: La. Clevenger et al., A COMPARISON OF C54-TISI2 FORMATION IN BLANKET AND SUBMICRON GATE STRUCTURES USING IRT SITU X-RAY-DIFFRACTION DURING RAPID THERMAL ANNEALING, Journal of materials research, 10(9), 1995, pp. 2355-2359