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Results:
1-1
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Results: 1
Authors:
DIEM B
REY P
RENARD S
BOSSON SV
BONO H
MICHEL F
DELAYE MT
DELAPIERRE G
Citation: B. Diem et al., SOI SIMOX - FROM BULK TO SURFACE MICROMACHINING, A NEW-AGE FOR SILICON SENSORS AND ACTUATORS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 8-16
Risultati:
1-1
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