Authors: MALDONADO JR DELLAGUARDIA F HECTOR S MCCORD M LIEBMANN L OERTEL HK

Citation: Jr. Maldonado et al., EFFECT OF ABSORBER THICKNESS ON IMAGE SHORTENING IN X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3094-3098