Authors: ZIMMER K DIENELT J HERFURTH F BRAUN A OTTE K LIPPOLD G GOTTSCHALCH V BIGL F

Citation: K. Zimmer et al., EXCIMER-LASER ETCHING OF GAAS, ALXGA1-XAS AND CUINSE2 IN CHLORINE ATMOSPHERE, Applied surface science, 129, 1998, pp. 800-804