Authors: JEAN A ELKHAKANI MA CHAKER M GAT E DODIER J PAPADOPOULLOS A LAFONTAINE H PEPIN H KIEFFER JC RAVET MF MADOURI A BOURNEIX J ROUSSEAUX F GUJRATHI SC

Citation: A. Jean et al., MECHANICAL-PROPERTIES OF SILICON-CARBIDE FILMS FOR X-RAY-LITHOGRAPHY APPLICATION, Canadian journal of physics, 70(10-11), 1992, pp. 834-837