Authors: DONIG F FELTZ A KULAKOV M HESSEL HE MEMMERT U BEHM RJ

Citation: F. Donig et al., GAS-PHASE ETCHING OF SI(111)-(7X7) SURFACES BY OXYGEN OBSERVED BY SCANNING-TUNNELING-MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 1955-1961