Authors: DANILIN AB DRAKIN KA MALININ AA MORDKOVICH VN PETROV AF SARAIKIN VV VYLETALINA OI

Citation: Ab. Danilin et al., SEQUENTIAL ION-BEAM SYNTHESIS OF BURIED SI3N4 LAYERS IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 83(1-2), 1993, pp. 173-176