Authors: CALE TS JAIN MK TAYLOR DS DUFFIN RL TRACY CJ

Citation: Ts. Cale et al., MODEL FOR SURFACE-DIFFUSION OF ALUMINUM-(1.5-PERCENT) COPPER DURING SPUTTER DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 311-318