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A SIMPLIFIED MODEL DESCRIBING ENHANCED GROWTH-RATES DURING VAPOR-PHASE SELECTIVE EPITAXY
Authors:
ZYBURA MF JONES SH DUVA JM DURGAVICH J
Citation:
Mf. Zybura et al., A SIMPLIFIED MODEL DESCRIBING ENHANCED GROWTH-RATES DURING VAPOR-PHASE SELECTIVE EPITAXY, Journal of electronic materials, 23(10), 1994, pp. 1055-1059
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