Authors:
CHITTIPEDDI S
DZIUBA CM
KANNAN VC
KELLY MJ
COCHRAN WT
RAMBABU B
Citation: S. Chittipeddi et al., EFFECT OF RAPID THERMALLY NITRIDED TITANIUM FILMS CONTACTING SILICIDED AND NONSILICIDED JUNCTIONS, Journal of electronic materials, 22(7), 1993, pp. 785-791
Authors:
CHITTIPEDDI S
KELLY MJ
VELAGA AN
KANNAN VC
DZIUBA CM
COCHRAN WT
RAMBABU B
Citation: S. Chittipeddi et al., EFFECT OF DOPANTS ON THE THERMAL-PROCESSING OF SALICIDED (TITANIUM DISALICIDED) CMOS STRUCTURES, Semiconductor science and technology, 8(11), 1993, pp. 2023-2029