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Measurement of physical thicknesses in micromachined structures consistingof glass and c-Si, by Fourier transform infrared reflection
Authors:
Kildemo, M Dalsrud, V Fostad, O
Citation:
M. Kildemo et al., Measurement of physical thicknesses in micromachined structures consistingof glass and c-Si, by Fourier transform infrared reflection, OPT ENG, 38(9), 1999, pp. 1542-1552
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