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Results: 1-3 |
Results: 3
Low open-area endpoint detection using a PCA-based T-2 statistic and Q statistic on optical emission spectroscopy measurements
Authors: White, DA Goodlin, BE Gower, AE Boning, DS Chen, H Sawin, HH Dalton, TJ
Citation: Da. White et al., Low open-area endpoint detection using a PCA-based T-2 statistic and Q statistic on optical emission spectroscopy measurements, IEEE SEMIC, 13(2), 2000, pp. 193-207
Characterization of Al, Cu, and TiN surface cleaning following a low-K dielectric etch
Authors: Matsuo, PJ Standaert, TEFM Allen, SD Oehrlein, GS Dalton, TJ
Citation: Pj. Matsuo et al., Characterization of Al, Cu, and TiN surface cleaning following a low-K dielectric etch, J VAC SCI B, 17(4), 1999, pp. 1435-1447
Patterning of fluorine-, hydrogen-, and carbon-containing SiO2-like low dielectric constant materials in high-density fluorocarbon plasmas: Comparison with SiO2
Authors: Standaert, TEFM Matsuo, PJ Allen, SD Oehrlein, GS Dalton, TJ
Citation: Tefm. Standaert et al., Patterning of fluorine-, hydrogen-, and carbon-containing SiO2-like low dielectric constant materials in high-density fluorocarbon plasmas: Comparison with SiO2, J VAC SCI A, 17(3), 1999, pp. 741-748
Risultati: 1-3 |