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Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
Authors:
Bardos, L Barankova, H Welzel, T Dani, I Peter, S Richter, F
Citation:
L. Bardos et al., Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing, J APPL PHYS, 90(4), 2001, pp. 1703-1709
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