Authors:
Karmanenko, SF
Semenov, AA
Khrebtov, IA
Leonov, VN
Johansen, TH
Galperin, YM
Bobyl, AV
Dedoboretz, AI
Gaevski, ME
Lunev, AV
Suris, RA
Citation: Sf. Karmanenko et al., Fabrication process and noise properties of antenna-coupled microbolometers based on superconducting YBCO films, SUPERCOND S, 13(3), 2000, pp. 273-286