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High-throughput, high-spatial-frequency measurement of critical dimension variations using memory circuits as electrical test structures
Authors: Ouyang, X Deeter, TL Berglund, CN McCord, MA Pease, RFW
Citation: X. Ouyang et al., High-throughput, high-spatial-frequency measurement of critical dimension variations using memory circuits as electrical test structures, J VAC SCI B, 17(6), 1999, pp. 2707-2713
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