Authors: Fritze, M Burns, J Wyatt, PW Chen, CK Gouker, P Chen, CL Keast, C Astolfi, D Yost, D Preble, D Curtis, A Davis, P Cann, S Deneault, S Liu, HY

Citation: M. Fritze et al., Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography, J VAC SCI B, 18(6), 2000, pp. 2886-2890