Authors: Magni, D Deschenaux, C Hollenstein, C Creatore, A Fayet, P

Citation: D. Magni et al., Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry, J PHYS D, 34(1), 2001, pp. 87-94

Authors: Deschenaux, C Affolter, A Magni, D Hollenstein, C Fayet, P

Citation: C. Deschenaux et al., Investigations of CH4, C2H2 and C2H4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry, J PHYS D, 32(15), 1999, pp. 1876-1886