Authors:
Magni, D
Deschenaux, C
Hollenstein, C
Creatore, A
Fayet, P
Citation: D. Magni et al., Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry, J PHYS D, 34(1), 2001, pp. 87-94
Authors:
Deschenaux, C
Affolter, A
Magni, D
Hollenstein, C
Fayet, P
Citation: C. Deschenaux et al., Investigations of CH4, C2H2 and C2H4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry, J PHYS D, 32(15), 1999, pp. 1876-1886