Authors: Harris, C Desta, Y Kelly, KW Calderon, G

Citation: C. Harris et al., Inexpensive, quickly producable X-ray mask for LIGA, MICROSYST T, 5(4), 1999, pp. 189-193

Authors: Coane, P Giasolli, R De Caro, F Mancini, DC Desta, Y Gottert, J

Citation: P. Coane et al., Graphite-based x-ray masks for deep and ultradeep x-ray lithography, J VAC SCI B, 16(6), 1998, pp. 3618-3624