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Rodriguez, MA
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Miera, BK
Dimos, D
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Authors:
Ruffner, JA
Clem, PG
Tuttle, BA
Dimos, D
Gonzales, DM
Citation: Ja. Ruffner et al., Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films, THIN SOL FI, 354(1-2), 1999, pp. 256-261