Authors:
Mannino, G
Stolk, PA
Cowern, NEB
de Boer, WB
Dirks, AG
Roozeboom, F
van Berkum, JGM
Woerlee, PH
Toan, NN
Citation: G. Mannino et al., Effect of heating ramp rates on transient enhanced diffusion in ion-implanted silicon, APPL PHYS L, 78(7), 2001, pp. 889-891
Authors:
Dirks, AG
Webster, MN
Turner, P
Rich, P
Butler, DC
Citation: Ag. Dirks et al., On the mechanism of aluminum via fill by reflow and forcefill as studied by transmission electron microscopy, J APPL PHYS, 85(1), 1999, pp. 571-577