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Results: 3
The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications
Authors: Koning, R Dixson, R Fu, J Vorburger, TV
Citation: R. Koning et al., The role of periodic interferometer errors in the calibration of capacitance displacement sensors for nanometrology applications, MEAS SCI T, 12(11), 2001, pp. 2002-2008
Algorithms for calculating single-atom step heights
Authors: Fu, J Tsai, V Koning, R Dixson, R Vorburger, T
Citation: J. Fu et al., Algorithms for calculating single-atom step heights, NANOTECHNOL, 10(4), 1999, pp. 428-433
Measurement error due to sample level misalignment on Si(111) single-atom step
Authors: Fu, J Tsai, V Konig, R Dixson, R Vorburger, T
Citation: J. Fu et al., Measurement error due to sample level misalignment on Si(111) single-atom step, SCANNING, 21(2), 1999, pp. 76-76
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